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- High precision laser optical system
- Choice of various wavelengths: Nd YAG : 1064nm 532nm 355nm 266nm "
- Minimum Laser repair size: 3 μm x 3 μm (2um *2um option)
- Resolution on X、Y、Z-axis : 0.1um/ pulse
- Repeatability on X、Y、Z-axis : 3um
- Industrial microscope and high resolution CCD with linear type LLC
- Semi-auto repair function
- Real time auto focus , time ≦ 1sec. (Option)
- Open defect repair system (Option)
- Glass-bar type stage in combination with customers robot arm for workpiece feeding system (Option)
- CIM system (Option)