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Laser Application Photomask Laser Repair Repair System
Laser Application

Photomask Laser Repair System


Photomask Laser Repair

  • In-house research and development of nano metal ink deposition system
  • Heat air gun for material drying and firing
  • Flash-Lamp pumped YAG Laser with θ 45 rotary for shaping mask lines
  • Industrial microscope and high resolution CCD with linear lens changer
  • Minimum Laser repair size: 3 μm x 3 μm (after laser trimming process )
  • Software auto focus
  • Integrated operating interface system
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